Semiconductor Gases
Our Unique Offerings – Made in America
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Our Fluorine (F2) Mixtures are offered 20% in N2, 10% in N2, and in pure (≥ 98.5%) grades, customized to your specific needs.
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Our Tungsten Hexafluoride (WF6), commonly used in chemical vapor deposition for the semiconductor industry, is available in different purity grades.
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Our Phosphorus Trifluoride (PF3), used for etching and as a cleaning agent in the semiconductor industry, is offered at 99.9%.
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Our Chlorine Trifluoride (CIF3) is used to clean chemical vapor deposition chambers in the semiconductor industry.
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Our Germanium Tetrafluoride (GeF4), used for ion implantation in the semiconductor industry, is available at 99.999%.
Other semiconductor offerings include packaged Anhydrous Hydrogen Fluoride (AHF), Antimony Pentafluoride (SbF5), Iodine Pentafluoride (IF5), Iridium Hexafluoride (IrF6), Molybdenum Hexafluoride (MoF6), Niobium Pentafluoride (NbF5), and Selenium Tetrafluoride (SeF4).
Benefits of Inhance Technologies
World-class fluorine expertise
Customized specifications
Unique technologies
Highest purity levels
Made in America,
with a global supply chain
Featured:
WF6
Tungsten Hexafluoride (WF6) is commonly used in the semiconductor industry for chemical vapor deposition. We offer customized specifications and collaborate with customers globally to meet their unique needs.
As our WF6 is made in America, we are in an excellent position to meet your onshoring needs.